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Optical model development for ellipsometric study of many-compound materials
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Here you can view and search the projects funded by NKFI since 2004
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C. Schmidt, P. Petrik, C. Schneider, M. Fried, T. Lohner, I. Bársony, J. Gyulai, and H. Ryssel: Optical characterization of ferroelectric Strontium-Bismuth-Tantalate (SBT) thin films, Thin Solid Films 455-456 (2004) 459-499, 2004 | G. Juhász, N. Q. Khánh, P. Petrik, T. Lohner, O. Polgár, M. Fried: Homogeneity check of ion implantation in silicon by wide-angle ellipsometry, 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION-2004), 14-17 June, 2004, Kazimierz Dolny, Poland, poszter, 2004 | Juhász György, Zolnai Zsolt, Nguyen Q. Khánh, Petrik Péter, Lohner Tivadar, Polgár Olivér és Fried Miklós,: Ionimplantáció homogenitásának ellenőrzése szélesszögű ellipszometriával, Fizikus Vándorgyűlés, Aug. 24-27, 2004, Szombathely, poszter, 2004 | Miklós Fried and Tivadar Lohner: Comparative investigation of ion implanted semiconductors using spectroscopic ellipsometry and ion beam analytical methods, 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION-2004), 14-17 June, 2004, Kazimierz Dolny, Poland, invited, 2004 | Petrik Péter, Lohner Tivadar, Fried Miklós, Polgár Olivér és Gyulai József: Nanostruktúrák optikai és szerkezeti tulajdonságainak meghatározása spektroszkópiai ellipszometriával, Fizikus Vándorgyűlés, Aug. 24-27, 2004, Szombathely, szóbeli, 2004 | P. Basa, P. Petrik, M. Fried, L. Dobos, B. Pécz, L. Tóth: Si nanocrystals in silicon nitride: An ellipsometric study using parametric semiconductor models, E-MRS 2006 Spring Meeting, Nice, May 29 – June 2, 2006; poszter, Physica E Volume: 38 Issue: 1-2 Pages: 76-79 Published: 2007, 2007 | P. Petrik, M. Fried, T. Lohner, N.Q. Khánh, P. Basa, O. Polgár, C. Major, J. Gyulai, F. Cayrel and D. Alquier: Dielectric function of disorder in high-fluence helium-implanted silicon, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 253, Iss. 1-2, pp. 192-195 (2006), 2006 | P. Basa, P. Petrik, M. Fried: Spectroscopic ellipsometric study of LPCVD deposited Si nanocrystals in SiNx and Si3N4, Sixth International Conference on Advanced Semiconductor Devices and Microsystems ASDAM'06, pp. 87-89 (2006)The Sixth International Conference on Advanced Semiconduct, 2006 | G. Juhász, P. Petrik, O. Polgár, M. Fried: Homogeneity check of ion implantation in silicon by wide-angle ellipsometry, 4th Workshop Ellipsometry, 20 - 22 February 2006, Berlin, Germany (poszter), 2006 | O. Polgár, M. Fried, N. Khanh, P.Petrik, I. Bársony: Determination of Ion Track Sizes and Shapes with Damage Simulations on the base of Ellipsometric and Backscattering Spectrometric Measurements, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | T. Lohner, Z. Zolnai, P. Petrik, G. Battistig, J. Garcia López, Y. Morilla, A. Koós, Z. Osváth, and M. Fried: Complex dielectric function of ion implantation amorphized SiC determined by spectroscopic ellipsometry, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | P. Basa, P. Petrik, M. Fried, A. Dâna, A. Aydinli, S. Foss, T. G. Finstad: Spectroscopic ellipsometric study of Ge nanocrystals embedded in SiO2 using parametric models, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | P. Kozma, N. Nagy, S. Kurunczi, P. Petrik, A. Hámori, A. Muskotál, F. Vonderviszt, M. Fried, I. Bársony: Ellipsometric characterization of flagellin films for biosensor applications, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | N. Nagy, A. Deák, A. Hámori, Z. Hórvölgyi, M. Fried, P. Petrik, I. Bársony: Comparative investigation of Stöber silica Langmuir-Blodgett films as optical model structures, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | P. Petrik, É. Vázsonyi, M. Fried, J. Volk, G. T. Andrews, A. L. Tóth, Cs. S. Daróczi, I. Bársony, J. Gyulai: Optical models for the ellipsometric characterisation of porous silicon structures, phys. stat. sol. (c) 2, No. 9, pp. 3319–3323 (2005), 2005 | P. Petrik, M. Fried, T. Lohner, O. Polgár, J. Gyulai, F. Cayrel, D. Alquier: Optical models for cavity profiles in high dose helium implanted and annealed silicon measured by ellipsometry, Journal of Applied Physics 97 (12), pp. 1-6 JUN 15 2005, 2005 | M. Fried, P. Petrik, Z. E. Horváth, T. Lohner C. Schmidt, C. Schneider, H. Ryssel: Optical and x-ray characterization of ferroelectric Strontium-Bismuth-Tantalate (SBT) thin films, Applied Surface Science, v. 253(1), 31 Oct. 2006, Pages 349-353 impf.: 1,497, 2006 | Nagy N, Deak A, Horvolgyi Z, Fried M, Agod A, Barsony I: Ellipsometry of silica nanoparticulate Langmuir-Blodgett films for the verification of the validity of effective medium approximations, LANGMUIR 22 (20): 8416-8423 SEP 26 2006, 2006 | O. Polgár, P. Petrik, T. Lohner, M. Fried: Evaluation strategies for multi-layer, multi-material ellipsometric measurements, Applied Surface Science, v. 253(1), 31 Oct. 2006, Pages 57-64, 2006 | P. Petrik, M. Fried, T. Lohner, I. Bársony, J. Gyulai: Ellipsometric characterization of nanocrystals in porous silicon, Applied Surface Science, v. 253(1), 31 Oct. 2006, Pages 200-203, 2006 | C. Major, G. Juhász, Z. Horváth, O. Polgar, M. Fried: Wide angle beam ellipsometry for extremely large samples, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | G. Juhász, Z. Horváth, C. Major, P. Petrik, O. Polgár, M. Fried: Non-collimated beam ellipsometry, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, oral presentation, Physica Status Solidi (c), in press, 2008 | M. Fried, N. Q. Khanh, P. Petrik: Defect profiling by ellipsometry using ion implantation through wedge masks, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 | P. Petrik, N. Q. Khánh, Jian Li, Jie Chen, R. W. Collins, M. Fried, G. Z. Radnóczi, T. Lohner, and J. Gyulai: Ion implantation induced disorder in single-crystal and sputter-deposited polycrystalline CdTe characterized by ellipsometry and backscattering spectrometry, 4th International Conference on Spectroscopic Ellipsometry, ICSE-4, 2007, Stockholm, Sweden, poster presentation, Physica Status Solidi (c), in press, 2008 |
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