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Investigation of physical and chemical basics of focused electron and ion beam nano-machining with special emphasis on possible applications in nanoelectronics
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Here you can view and search the projects funded by NKFI since 2004
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List of publications |
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Horváth ZE, Kertész K, Koós AA, Horváth E, Vértesy Z, Molnár G,.: Mats of functionalized carbon nanotubes for gas/vapor sensing,, Nanopages 1 (2) 209 – 217 (új folyóirat, IF=1), 2006 | Horváth E., Imre A., Tóth A.L., Porod W.: Patterning of Magnetic Nanoobjects by FIB, XIIth International Conference on Electron Microscopy of Solids, june 4-9 2005, Kazimierz Dolny, Poland, poszter, 2005 | 3. Horváth E, Németh A, Koós AA, Tóth AL, Biró LP, Gyulai J: Focused Ion Beam based sputtering yield measurements on ZnO and Mo thin films,, E-MRS 2006 Spring Meeting, May 29 - June 2, Nice, France, 2006 | Horváth E, Neumann PL, Koós AA, Tóth AL: Fókuszált ionsugárral leválasztott W csíkok morfológiai és elektromos vizsgálata, Műszki Kémiai Napok 07, Konferencia Kiadvány pp. 243-246, 2007 április 25 – 27, Veszprém, 2007 | Horváth E, Tóth AL, Neumann PL: Anyagmegmunkálás fókuszált sugarakkal „Tapasztalatok és lehetőségek”, MMT 07, 2007 május 24-26, Balatonalmádi (szóbeli) – legjobb előadás díj, 2007 | Horváth E, Neumann PL, Tóth AL, Horváth ZE, Biró LP: The temperature dependence of FIB deposited W wire resistance, E-MRS 2007 Spring Meeting, May 28 – June 1, 2007 Strasbourg. (poszter), 2007 | Horváth E, Nemes-Incze P, Neumann PL, Tóth AL, Horváth ZE, Biró LP, Hernández-Ramírez F, Romano-Rodríguez A,: Morphological and electrical study of electron beam deposited tungsten layers and wires,, EUROMAT 2007, Sept 10-13, 2007 Nürnberg, 2007 | Zolnai Z, Tóth AL, Deák A, Nagy N and Battistig G:: The effect of FIB on ordered colloidal nanoparticulate masks, 11th International Conference on Nuclear Microprobe Technology and Applications, 2008, Debrecen, Hungary, Poster presentation, 2008 | Gyurcsányi, L Höfler, Á Cserkaszky, T Varga, G Lautner, Gy Jágerszki, P Fürjes, A L. Tóth: Chemically Modified Solid-State Nanopores for Sensing, Proceedings of International Conference on Electrochemical Sensors, p. 88., Dobogókő, Hungary, 2008, 2008 | E Horvath, A. Imre, A.L.Toth, W.Porod: Nanoobject Patterning by FIB, HUNS-2005 Hung.Nanotechnology Symp., Budapest, March 21-22 2005 Book of Abstract, p 50, 2005 | Horváth E, Neumann PL, Tóth AL, Vázsonyi É, Biró LP, Fürjes P, Dücső Cs: Electrical characterization of tungsten nanowires deposited by focused ion beam (FIB), Nanopages, 1 (2) 253-260 (új folyóirat, IF=1), 2006 | Horváth E, Neumann PL, Tóth AL, Koós AA, Horváth ZE, Biró LP: Morphological and Electrical Study of FIB Deposited W Wires,, Microelectr. Eng. 84 (2007) 837-840., 2007 | Horváth E, Németh, Koós AA, Bein MC, Tóth AL, Horváth ZE, Biró LP, Gyulai J: Focused ion beam based sputtering yield measurements on ZnO and Mo thin films,, SUPERLATTICES AND MICROSTRUCTURES 42 (1-6): 392-397 JUL-DEC 2007, 2007 | Barna Á., Kotis L., Lábár JL, Osváth Z., Tóth AL, Menyhárd.M,: Ion beam mixing by focused ion beam , JOURNAL OF APPLIED PHYSICS 102 053513, 2007 | A. Barna, S. Gurban, L. Kotis, A.L. Toth, M. Menyhard: Ion mixing at 20 keV: A comparison of the effects of Ga+, Ar+ and CF4 + ion irradiation, Ultramicroscopy 109 (2008) 129–132, 2008 | Horváth E: Nanomegmunkálás, elektron- és ionsugaras leválasztás (nano-EBAD és nano-IBAD) és jellemzésük, BME / MTA-MFA, 2009 | Barna A, Kotis L, Lábár J, Osváth Z, Tóth AL, Menyhárd M, Zalar A , Panjan P: Producing metastable nano-phase with sharp interface by means of focused ion beam irradiation, JOURNAL OF APPLIED PHYSICS 105, 044305, 2009 |
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