Protein and nanocrystalline semiconductor layers for sensors and photovoltaics  Page description

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Details of project

  
Identifier
81842
Type K
Principal investigator Petrik, Péter
Title in Hungarian Fehérje és nanokristályos félvezető rétegek szenzorikához és fotovoltaikához
Title in English Protein and nanocrystalline semiconductor layers for sensors and photovoltaics
Keywords in Hungarian fehérje, nanokristály, ellipszometria, OWLS, ionsugaras analitika
Keywords in English protein, nanocrystal, ellipsometry, OWLS, ion beam analysis
Discipline
Electronic Devices and Technologies (Council of Physical Sciences)70 %
Material Science and Technology (engineering and metallurgy) (Council of Physical Sciences)30 %
Ortelius classification: Nanotechnology (Materials technology)
Panel Informatics and Electrical Engineering
Department or equivalent Institute of Technical Physics and Materials Science (Research Center of Natural Sciences)
Participants Fodor, Bálint
Fried, Miklós
Horváth, Róbert
Kurunczi, Sándor
Lohner, Tivadar
Zolnai, Zsolt
Starting date 2010-02-01
Closing date 2014-01-31
Funding (in million HUF) 8.488
FTE (full time equivalent) 5.16
state closed project
Summary in Hungarian
A project célja (1) fehérje és nanokristályos félvezetőrétegek immobilizációjának és leválasztásának tökéletesítése, valamint (2) az in situ Spektroszkópiai Ellipszometria (SE), az Optikai Hullámvezető Fénymódus Spektroszkópia (OWLS) és az ionsugaras analitika fejlesztése a rétegépülés jobb megértése és a rétegkészítési módszerek optimalizálása céljából. Az SE, OWLS és ionsugaras analitikai módszereket továbbfejlesztjük és összehasonlítjuk. Feltérképezzük a módszerek határait, és hogy milyen információkat szolgáltatnak a rétegszerkezettel kapcsolatban. Az így megszerzett tudást többek között az intézetünkben végzett bioszenzorikai és fotovoltaikus anyagtudományi fejlesztésekben fogjuk hasznosítani. Mind a két nanoszerkezet típust folyadékcellában vagy Langmuir-Blodgett technikával állítjuk elő az intézetben, a rétegépülést pedig optikai módszereinkkel nyomonkövetjük. A bioszenzorika területén elsősorban egy speciális fehérjét, a flagelláris filamentumot szeretnénk vizsgálni. A félvezető nanokristály rétegeket kolloid oldatokból szeretnénk előállítani. A javasolt munka futó EU FP6 (ANNA – http://www.i3-anna.org) és elnyert EU FP7 (P3SENS) EU projekteket is támogat, csakúgy mint számos egyéb hazai és külföldi egyetemmel, kutatóintézettel és (főként hazai) technológiai céggel végzett együttműködést. Jelenleg két PhD, két dipoma és két TDK munka folyik laboratóriumunkban a témában. A megpályázott munka hozzájárulna intézetünk fejlődéséhez mind az optikai metrológia, mind a szenzorikai és fotovoltaikus célú rétegkészítési módszerek fejlesztése terén.
Summary
The aim of this project is (1) to improve our methods to deposit and immobilize protein and nanocrystalline semiconductor layers, and (2) to develop in situ Spectroscopic Ellipsometry (SE), Optical Waveguide Lightmode Spectroscopy (OWLS), and ion beam analysis in order to gain deeper understanding on protein and nanocrystalline semiconductor layer build-up, providing valuable feed-back for the optimization of the preparation techniques. SE, OWLS, and ion beam techniques will be investigated and compared in terms of their limitations and the information they provide on the layer structure. This knowledge will be used to improve biosensors and photovoltaic thin films being developed in our institute. Both types of nanostructures will be created using deposition techniques including liquid cells or the Langmuir-Blodgett method, using our optical techniques to follow the layer build up in situ. In case of biosensors we focus on a special protein (flagellar filaments), whereas semiconductor nanocrystal layers will mainly be prepared from colloidal solutions. The proposed work is connected to running EU FP6 (ANNA – http://www.i3-anna.org) and accepted EU FP7 (P3SENS) EU projects, and further cooperations with numerous domestic and foreign universities, research institutes, and companies. Currently two PhD, two diploma, and two TDK works are running on this topic in our laboratory. The proposed work will improve the capabilities of our institute in both optical metrology and preparation of high quality thin films for sensorics and photovoltaic applications.




 

Final report

  
Results in Hungarian
A projekt során fehérje és félvezető nanoszerkezeteket készítettünk szenzorikai és fotovoltaikus alkalmazásokhoz. A rétegek és szerkezetek vizsgálatára optikai mérő- (spektroszkópiai ellipszometria, optikai hullámvezető fénymódus spektroszkópia) és kiegészítőberendezéseket (folyadékcellák, optikai elrendezések) fejlesztettünk. A mért adatok értelmezéséhez optikai modelleket, és az indirekt módszer által megkövetelt paraméter-illesztésekhez kiértékelő algoritmusokat fejlesztettünk. A mérések alapján feltártuk a vizsgált minták szerkezetét, és megvizsgáltok az optikai módszerek lehetőségeit és határait. A méréseinket referencia módszerekkel ellenőriztünk. A projekthez kapcsolódóan két könyvfejezet, 40 cikk, PhD és diploma dolgozatok, országos TDK első helyezés, és számos konferencia előadás született.
Results in English
In the project, protein and semiconductor layers and nanostructures for sensor and photovoltaic applications have been prepared. We developed optical measurement tools (spectroscopic ellipsometry, optical waveguide lightmode spectroscopy) and accessories (flow cells and components for special optical arrangements) for the measurements of the layers and structures. To evaluate the measured data, optical models and algorithms have been created, required by the indirect optical measurements. Based on the measurement, we revealed the structures of the samples, and investigated the applicability and limitations of the optical methods. The results have been checked by reference measurements. We published 2 book chapters, 40 papers, PhD and master theses, presented the results at conferences, and one of our students had the first prize at the OTDK competition.
Full text https://www.otka-palyazat.hu/download.php?type=zarobeszamolo&projektid=81842
Decision
Yes





 

List of publications

  
Kurunczi S, Németh A, Hülber T, Kozma P, Petrik P, Jankovics H, Sebestyén A, Vonderviszt F, Fried M, Bársony I: In situ ellipsometric study ofsurface immobilization of flagellar filaments, Applied Surface Science 257, pp. 319, 2010
Nemeth A, Kozma P, Hulber T, Kurunczi S, Horvath R, Petrik P, Muskotal A, Vonderviszt F, Hos C, Fried M, Gyulai J, Barsony I: In Situ Spectroscopic Ellipsometry Study of Protein Immobilization on Different Substrates Using Liquid Cells, Sensor Letters 8, pp. 730, 2010
P Kozma, B Fodor, A Deak, P Petrik: Optical models for the characterization of silica nanosphere monolayers prepared by the Langmuir-Blodgett method using ellipsometry in the quasistatic regime, Langmuir 26, pp. 16122, 2010
A. Szekeres, Zs. Fogarassy, P. Petrik, E. Vlaikova, A. Cziraki, G. Socol, C. Ristoscu, S. Grigorescu, I.N. Mihailescu: Structural characterization of AlN films synthesized by pulsed laser deposition, Applied Surface Science 257, pp. 5370, 2011
E. Agocs, P. Petrik, S. Milita, L. Vanzetti, S. Gardelis, A.G. Nassiopoulou, G. Pucker, R. Balboni, M. Fried: Optical characterization of nanocrystals in silicon rich oxide superlattices and porous silicon, Thin Solid Films 519, pp. 3002, 2011
I. Mohacsi, P. Petrik, M. Fried, T. Lohner, J.A. van den Berg, M.A. Reading, D. Giubertoni, M. Barozzi, A. Parisini: Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si, Thin Solid Films 519, pp. 2847, 2011
P. Petrik, Z. Zolnai, O. Polgar, M. Fried, Z. Betyak, E. Agocs, T. Lohner, C. Werner, M. Röppischer, C. Cobet: Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry, Thin Solid Films 519, pp. 2791, 2011
T. Lohner, P. Csíkvári, N.Q. Khánh, S. Dávid, Z.E. Horváth, P. Petrik, G. Hárs: Spectroellipsometric and ion beam analytical investigation of nanocrystalline diamond layers, Thin Solid Films 519, pp. 2806, 2011
S. Bin Anooz, J. Schwarzkopf, R. Dirsyte, E. Agócs, P. Petrik, A. Kwasniewski, G. Wagner, R. Fornari: Spectroscopic ellipsometry studies on the optical constants of Bi4Ti3O12:xNa thin films grown by metal-organic chemical vapor deposition, Thin Solid Films 519, pp. 3782, 2011
E. Agocs, P. Petrik, M. Fried, A. G. Nassiopoulou: Optical characterization using ellipsometry of Si nanocrystal thin layers embedded in silicon oxide, Mater. Res. Soc. Symp. Proc. Vol. 1321, DOI: 10.1557/opl.2011.949, 2011
G. Gyulai, Cs.B. Pénzes, M. Mohai, T. Lohner, P. Petrik, S. Kurunczi, É. Kiss: Interfacial properties of hydrophilized poly(lactic-co-glycolic acid) layers with various thicknesses, Journal of Colloid and Interface Science 362, pp. 600, 2011
P. Kozma, D. Kozma, A. Nemeth, H. Jankovics, S. Kurunczi, R. Horvath, F. Vonderviszt, M. Fried, P. Petrik: In-depth characterization and computational 3D reconstruction of flagellar filament protein layer structure based on in situ spectroscopic ellipsometry, Applied Surface Science 257, pp. 7160, 2011
Petrik Péter: Ellipszometria – Nanoszerkezetek optikai vizsgálata, Természet Világa 142, pp. 232., 2011
P. Petrik, H. Egger, S. Eiden, E. Agocs, M. Fried, B. Pecz, K. Kolari, T. Aalto, R. Horvath, D. Giannone: Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors, Mater. Res. Soc. Symp. Proc. 1352 (2011) pp. 81, Materials Research Society DOI: 10.1557/opl.2011.1342, 2011
F. Dortu, H. Egger, K. Kolari, T. Haatainen, P. Furjes, Z. Fekete, D. Bernier, G. Sharp, B. Lahiri, S. Kurunczi, J.-C. Sanchez, N. Turck, P. Petrik, D. Patko, R. Horvath, S. Eiden, T. Aalto, S. Watts, N. P. Johnson, R. M. De La Rue, D. Giannone: Design and process development of a photonic crystal polymer biosensor for point of care diagnostics, SPIE-OSA VOl. 8087, 80870D-1, 2011
Fodor B, Kozma P, Deák A, Nagy N, Zolnai Z, Petrik P, and Fried M: Spectroscopic Ellipsometry investigation of silica nanosphere monolayers before and after ion irradiation-induced shape transformation, EuroNanoForum, Budapest, Hungary, 30 May– 1 June 2011, poszter, 2011
E. Agocs, P. Petrik, A. G. Nassiopoulou, S. Gradelis, and S. Milita: Ellipsometric investigation of nanocrystalline Si thin films, EuroNanoForum, Budapest, Hungary, 30 May – 1 June, 2011
I. Mohacsi, P. Petrik, M. Fried, T. Lohner, J. A. van den Berg, M. A. Reading, D. Giubertoni, E. Demenev, S. Gennaro, A. Parisini: Parameterization of ultra-shallow disorder profiles in ion implanted Si, EuroNanoForum, Budapest, Hungary, 30 May – 1 June, 2011
A. Nemeth, P. Kozma, P. Petrik, S. Kurunczi, R. Horvath, M. Fried, H. Jankovics, F. Vonderviszt: In situ optical characterization of filamental protein structure formation for biosensing, EuroNanoForum, Budapest, Hungary, 30 May – 1 June, 2011
E. Agócs, P. Petrik, M. Fried, and A. G. Nassiopoulou: Optical characterization using ellipsometry of Si nanocrystal thin layers embedded in silicon oxide, Mater. Res. Soc. Symp. Proc. Vol. 1321 (2011) 367, 2011
M. Fabian, E. Svab, V. Pamukchieva, A. Szekeres, P. Petrik, S. Vogel, and U. Ruett: Study of As-Se-Te glasses by neutron-, X-ray diffraction and optical spectroscopic methods, Journal of Non-crystalline Solids 358 (2012) 860, 2012
M. Fried, G. Juhasz, C. Major, A. Nemeth, P. Petrik, C. Salupo, L. R. Dahal, R. W. Collins: Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers, Mater. Res. Soc. Symp. Proc. Vol. 1323 (2012) 267, 2012
L. Korosi, S. Papp, S. Beke, B. Pecz, R. Horvath, P. Petrik, E. Agocs, I. Dekany: Highly transparent ITO thin films on photosensitive glass: sol–gel synthesis, structure, morphology and optical properties, Applied Physics A 107 (2012) 385, 2012
I. Banyasz, S. Berneschi, M. Bettinelli, M. Brenci, M. Fried, N. Q. Khanh, T. Lohner, G. N. Conti, S. Pelli, P. Petrik, G. C. Righini, A. Speghini, A. Watterich, Z. Zolnai: MeV Energy \hbox {N}^{+} -Implanted Planar Optical Waveguides in Er-Doped Tungsten-Tellurite Glass Operating at 1.55 micron, Photonics Journal IEEE, 2012
D. Giannone, F. Dortu, D. Bernier, N. P. Johnson, G. J. Sharp, L. Hou, A. Z. Khokhar, P. Furjes, S. Kurunczi, P. Petrik, R. Horvath, T. Aalto, K. Kolari, S. Ylinen, T. Haatainen, H. Egger: NIL fabrication of a polymer-based photonic sensor device in P3SENS project, SPIE Proceedings 8435 (2012) 843529-1, 2012
L. Korosi, S. Papp, V. Hornok, A. Oszko, P. Petrik, D. Patko, R. Horvath, I. Dekany: Titanate nanotube thin films with enhanced thermal stability and high-transparency prepared from additive-free sols, Journal of Solid State Chemistry 192(2012) 342, 2012
E. Agocs, A. G. Nassiopoulou, S. Milita, and P. Petrik: Model dielectric function analysis of the critical point features of silicon nanocrystal films in a broad parameter range, Thin Solid Films, In Press, http://dx.doi.org/10.1016/j.tsf.2012.10.126, 2012
T. Lohner, P. Csikvari, P. Petrik, G. Hars: Spectroellipsometric characterization of nanocrystalline diamond layers, Applied Surface Science, In Press, http://dx.doi.org/10.1016/j.apsusc.2012.12.006, 2013
A. Saftics, E. Agocs, B. Fodor, D. Patko, P. Petrik, K. Kolari, T. Aalto, P. Furjes, R. Horvath, S. Kurunczi: Investigation of thin polymer layers for biosensor applications, Applied Surface Science, In Press, http://dx.doi.org/10.1016/j.apsusc.2012.12.042, 2013
A. Szekeres, S. Alexandrova, P. Petrik, B. Fodor, S. Bakalova: Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation, Applied Surface Science, In Press, http://dx.doi.org/10.1016/j.apsusc.2012.12.024, 2013
P. Petrik, B. Pollakowski, S. Zakel, T. Gumprecht, B. Beckhoff, M. Lemberger, Z. Labadi, Z. Baji, M. Jank, and A. Nutsch: Characterization of ZnO structures by optical and X-ray methods, Applied Surface Science, In Press, http://dx.doi.org/10.1016/j.apsusc.2012.12.035, 2013
P. Petrik, T. Gumprecht, A. Nutsch, G. Roeder, M. Lemberger, G. Juhasz, O. Polgar, C. Major, P. Kozma, M. Janosov, B. Fodor, E. Agocs, M. Fried: Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry, Thin Solid Films, In Press, http://dx.doi.org/10.1016/j.tsf.2012.12.091, 2013
P. Petrik: Characterization of Nanocrystals Using Spectroscopic Ellipsometry, In: Sudheer Neralla (szerk.) Nanocrystals - Synthesis, Characterization and Applications, Rijeka: InTech, 2012. pp. 29-40. (ISBN:978-953-51-0714-9), 2012
P. Petrik and M. Fried: Ellipsometry of semiconductor nanocrystals, Ellipsometry at the nanoscale, M. Losurdo and K. Hingerl, Editors, DOI: 10.1007/978-642-33956-1, ISBN 978-3-642-33955-4, Springer-Verlag Berlin Heidelberg, 201, 2013
P. Petrik, A. Nemeth, P. Kozma, T. Hulber, R. Horvath, S. Kurunczi, A. Hamori, M. Fried: In situ measurement of Protein Adsorption by Spectroscopic Ellipsometry, Protein and Peptide Conference, March 23-25, 2012, Beijing,·China, invited oral presentation, 2012
P. Petrik: Optical thin film metrology for optoelectronics, Journal of Physics - Conference series 398 (2012) 012002, 2012
B. Fodor, P. Kozma, N. Nagy, Z. Zolnai, M. Fried, and P. Petrik: Ellipsometric Characterization of Ion Irradiated Monolayers of Submicron Silica Particles, EMRS 2012 Spring Meeting, May 14-18, 2012, Strasbourg, France, poster presentation, 2012
A. Nemeth, P. Kozma, S. Kurunczi, R. Horvath, M. Fried, H. Jankovics, F. Vonderviszt, P. Petrik: In situ optical characterization and numerical modeling of filamental protein structure formation for biosensing, EMRS 2012 Spring Meeting, May 14-18, 2012, Strasbourg, France, oral presentation, 2012
M. Janosov, P. Kozma, A. Hamori, D. Patko, S. , Kurunczi, K. Cottier, R. Horvath, M. Fried, P. Petrik: Spectroscopic ellipsometry - grating coupled interferometry sensor combination, EMRS 2012 Fall Meeting, September 17-21, 2012, Warsaw, Poland, poster presentation, 2012
A. Nemeth, P. Kozma, S. Kurunczi, R. Horvath, M. Fried, H. Jankovics, F. Vonderviszt, P. Petrik: In situ ellipsometry and numerical modeling of rodlike protein adsorption, EMRS 2012 Fall Meeting, September 17-21, 2012, Warsaw, Poland, poster presentation, 2012
B. Fodor, P. Petrik, J. Volk, I. Lukacs, Seungjun Oh, Yutaka Wakayama, T. Nagata, M. Fried: Mueller Matrix Ellipsometry of Two-Dimensional Periodic Submicron Structures, EMRS 2012 Fall Meeting, September 17-21, 2012, Warsaw, Poland, poster presentation, 2012
N. Nagy, Z. Zolnai, E. Fulop, A. Deak, I. Barsony: Tunable ion-swelling for nanopatterning of macroscopic surfaces: The role of proximity effects, Applied Surface Science 259 (2012) 331, 2012
N. Nagy, Z. Zolnai, A. Deak, M. Fried, I. Barsony: Various nanostructures on macroscopically large areas prepared by tunable ion-swelling, Journal of Nanoscience and Nanotechnology 12 (2012) 6712, 2012
Kurunczi S, Németh A, Hülber T, Kozma P, Petrik P, Jankovics H, Sebestyén A, Vonderviszt F, Fried M, Bársony I: In situ ellipsometric study ofsurface immobilization of flagellar filaments, Applied Surface Science 257, pp. 319, 2010
Nemeth A, Kozma P, Hulber T, Kurunczi S, Horvath R, Petrik P, Muskotal A, Vonderviszt F, Hos C, Fried M, Gyulai J, Barsony I: In Situ Spectroscopic Ellipsometry Study of Protein Immobilization on Different Substrates Using Liquid Cells, Sensor Letters 8, pp. 730, 2010
P Kozma, B Fodor, A Deak, P Petrik: Optical models for the characterization of silica nanosphere monolayers prepared by the Langmuir-Blodgett method using ellipsometry in the quasistatic regime, Langmuir 26, pp. 16122, 2010
P. Petrik, Z. Zolnai, O. Polgar, M. Fried, Z. Betyak, E. Agocs, T. Lohner, C. Werner, M. Röppischer, C. Cobet: Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry, Thin Solid Films 519, pp. 2791, 2011
E. Agocs, P. Petrik, S. Milita, L. Vanzetti, S. Gardelis, A.G. Nassiopoulou, G. Pucker, R. Balboni, M. Fried: Optical characterization of nanocrystals in silicon rich oxide superlattices and porous silicon, Thin Solid Films 519, pp. 3002, 2011
I. Mohacsi, P. Petrik, M. Fried, T. Lohner, J.A. van den Berg, M.A. Reading, D. Giubertoni, M. Barozzi, A. Parisini: Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si, Thin Solid Films 519, pp. 2847, 2011
T. Lohner, P. Csíkvári, N.Q. Khánh, S. Dávid, Z.E. Horváth, P. Petrik, G. Hárs: Spectroellipsometric and ion beam analytical investigation of nanocrystalline diamond layers, Thin Solid Films 519, pp. 2806, 2011
S. Bin Anooz, J. Schwarzkopf, R. Dirsyte, E. Agócs, P. Petrik, A. Kwasniewski, G. Wagner, R. Fornari: Spectroscopic ellipsometry studies on the optical constants of Bi4Ti3O12:xNa thin films grown by metal-organic chemical vapor deposition, Thin Solid Films 519, pp. 3782, 2011
E. Agocs, P. Petrik, M. Fried, A. G. Nassiopoulou: Optical characterization using ellipsometry of Si nanocrystal thin layers embedded in silicon oxide, Mater. Res. Soc. Symp. Proc. Vol. 1321, DOI: 10.1557/opl.2011.949, 2011
P. Kozma, D. Kozma, A. Nemeth, H. Jankovics, S. Kurunczi, R. Horvath, F. Vonderviszt, M. Fried, P. Petrik: In-depth characterization and computational 3D reconstruction of flagellar filament protein layer structure based on in situ spectroscopic ellipsometry, Applied Surface Science 257, pp. 7160, 2011
P. Petrik, H. Egger, S. Eiden, E. Agocs, M. Fried, B. Pecz, K. Kolari, T. Aalto, R. Horvath, D. Giannone: Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors, Mater. Res. Soc. Symp. Proc. 1352 (2011) pp. 81, Materials Research Society DOI: 10.1557/opl.2011.1342, 2011
G. Gyulai, Cs.B. Pénzes, M. Mohai, T. Lohner, P. Petrik, S. Kurunczi, É. Kiss: Interfacial properties of hydrophilized poly(lactic-co-glycolic acid) layers with various thicknesses, Journal of Colloid and Interface Science 362, pp. 600, 2011
F. Dortu, H. Egger, K. Kolari, T. Haatainen, P. Furjes, Z. Fekete, D. Bernier, G. Sharp, B. Lahiri, S. Kurunczi, J.-C. Sanchez, N. Turck, P. Petrik, D. Patko, R. Horvath, S. Eiden, T. Aalto, S. Watts, N. P. Johnson, R. M. De La Rue, D. Giannone: Design and process development of a photonic crystal polymer biosensor for point of care diagnostics, SPIE-OSA VOl. 8087, 80870D-1, 2011
A. Szekeres, Zs. Fogarassy, P. Petrik, E. Vlaikova, A. Cziraki, G. Socol, C. Ristoscu, S. Grigorescu, I.N. Mihailescu: Structural characterization of AlN films synthesized by pulsed laser deposition, Applied Surface Science 257, pp. 5370, 2011
E. Agocs, A. G. Nassiopoulou, S. Milita, and P. Petrik: Model dielectric function analysis of the critical point features of silicon nanocrystal films in a broad parameter range, Thin Solid Films 541, pp. 53, 2013
A. Nemeth, P. Kozma, S. Kurunczi, R. Horvath, M. Fried, H. Jankovics, F. Vonderviszt, P. Petrik: In situ optical characterization and numerical modeling of filamental protein structure formation for biosensing, EMRS 2012 Spring Meeting, May 14-18, 2012, Strasbourg, France, 2012
S. Lugomer, Z. Zolnai, A. L. Toth, I. Barsony, A. Maksimovic, N. Nagy: Reorganization of Langmuir-Blodgett layers of silica nanoparticles induced by the low energy, high fluence ion irradiation, Thin Solid Films 520 (2012) 4046, 2012
D. Giannone, F. Dortu, D. Bernier, N. P. Johnson, G. J. Sharp, L. Hou, A. Z. Khokhar, P. Furjes, S. Kurunczi, P. Petrik, R. Horvath, T. Aalto, K. Kolari, S. Ylinen, T. Haatainen, H. Egger: NIL fabrication of a polymer-based photonic sensor device in P3SENS project, SPIE Proceedings 8435 (2012) 843529-1, 2012
A. Saftics, E. Agocs, B. Fodor, D. Patko, P. Petrik, K. Kolari, T. Aalto, P. Furjes, R. Horvath, S. Kurunczi: Investigation of thin polymer layers for biosensor applications, Applied Surface Science 281 (2013) 66, 2013
T. Lohner, P. Csikvari, P. Petrik, G. Hars: Spectroellipsometric characterization of nanocrystalline diamond layers, Applied Surface Science 281, pp. 113, 2013
Z. Zolnai: Shape, size, and atomic composition analysis of nanostructures in 3D by Rutherford backscattering spectrometry, Applied Surface Science 281, pp. 17, 2013
P. Petrik, T. Gumprecht, A. Nutsch, G. Roeder, M. Lemberger, G. Juhasz, O. Polgar, C. Major, P. Kozma, M. Janosov, B. Fodor, E. Agocs, M. Fried: Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry, Thin Solid Films 541, pp. 131, 2013
P. Petrik, B. Pollakowski, S. Zakel, T. Gumprecht, B. Beckhoff, M. Lemberger, Z. Labadi, Z. Baji, M. Jank, and A. Nutsch: Characterization of ZnO structures by optical and X-ray methods, Applied Surface Science 281, pp. 123, 2013
A. Szekeres, S. Alexandrova, P. Petrik, B. Fodor, S. Bakalova: Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation, Applied Surface Science 281 (2013) 105, 2013
T. Lohner, A. Németh, A.L. Tóth, N.Q. Khánh, E. Szilágyi, P. Petrik, Z. Zolnai, P. Kostka, J. Waizinger, E. Kótai, M. Fried, I. Bársony, J. Gyulai: Real-time in situ spectroscopic ellipsometry studies of ion bombardment effects on single crystalline germanium, 6th International Conference on Spectroscopic Ellipsometry, Kyoto, May 26-31, 2013 poster, 2013
P. Petrik, E. Agocs: High Sensitivity Optical Characterization of Thin Films with Embedded Si Nanocrystals, ECS Transactions 53, pp. 43, 2013
T. Gumprecht, P. Petrik, G. Roeder, M. Schellenberger, L. Pfitzner, B. Pollakowski, B. Beckhoff: Characterization of thin ZnO films by vacuum ultra-violet reflectometry, MRS Proceedings 1494, pp. 65, 2013
P. Petrik, N. Kumar, E. Agocs, B. Fodor, S. F. Pereira, T. Lohner, M. Fried, H. P. Urbach: Optical characterization of laterally and vertically structured oxides and semiconductors, SPIE Proceedings, közlésre elfogadva, 2014
P. Petrik, E. Agocs, J. Volk, I. Lukacs, B. Fodor, P. Kozma, T. Lohner, S. Oh, Y. Wakayama, T. Nagata, M. Fried: Resolving lateral and vertical structures by ellipsometry using wavelength range scan, Thin Solid Films, 2014
B. Fodor, F. Cayrel, E. Agocs, D. Alquier, M. Fried, P. Petrik: Characterization of in-depth cavity distribution after thermal annealing of helium-implanted silicon and gallium nitride, Thin Solid Films, nyomdai előkészítés alatt, 2014
E. Agocs, B. Fodor, B. Pollakowski, B. Beckhoff, A. Nutsch, M. Jank, P. Petrik: Approaches to calculate the dielectric function of ZnO around the band gap, Thin Solid Films, 2014
P. Petrik: Parameterization of the dielectric function of semiconductor nanocrystals, Physica B, közlésre elfogadva, 2014
T. Lohner, E. Agocs, P. Petrik, Z. Zolnai, E. Szilagyi, I. Kovacs, Z. Szokefalvi-Nagy, I. Barsony: Spectroellipsometric and ion beam analytical studies on a glazed ceramic object with metallic lustre decoration, Thin Solid Films, nyomdai előkészítés alatt, 2014




 

Events of the project

  
2013-11-12 13:45:17
Résztvevők változása
2013-04-05 17:36:06
Résztvevők változása
2012-04-13 10:54:12
Résztvevők változása



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